Dr. Kim's Lab

Piezoelectric-based MEMS devices for sensor (chemical and biological detection) and actuator application (electrical switch).
Novel MEMS/NEMS devices using smart materials
Understanding electromechanical properties of ferroelectric and piezoelectric thin films and nano-structures: double-beam laser interferometer, piezoelectric scanning probe microscopy, time-resolved synchrotron X-ray scattering method, near-field optical microscopy.
Functional oxide nanoscale-structures and fabrication (e-beam lithography, dip-pen, modified chemical solution process)
Integrated high-K ferroelectric capacitors for high power electronic system and tunable devices.
Thin film deposition with sputtering (rf, dc, ion-beam), chemical vapor deposition, evaporation (e-beam and thermal), chemical solution deposition (sol-gel and MOD); characterization of thin films with various structural and electrical measurement techniques as well as computer automation.
Development of micro/nanofabrication processes for advanced devices.