ELEC 6750
Introduction
to Plasma Engineering
Spring 2004
MWF
Electrical
breakdown and discharges in gases, basic plasma theories, industrial and
scientific applications of plasmas, plasma processing techniques for
microelectronic fabrication.
Textbook: 1. Lecture notes and technical
papers.
2. (Optional) Alfred Grill, Cold Plasma in Materials Fabrication, IEEE Press, 1994.
References: 1. F.F. Chen, Introduction to Plasma Physics and Controlled Fusion, Vol.1: Plasma
Physics, 2nd Edition, Plenum Press, 1984.
2. Brian Chapman, Glow
Discharge Processes, John Wiley & Sons, 1980.
Instructor: Y. Tzeng, Professor of Electrical
and Computer Engineering
Tel: 844-1869, e-mail: tzengy@eng.auburn.edu
BN 412.
Research areas: See faculty information
on ECE Dept web pages.
Goals: This course is intended to familiarize students
with basic theories of gas discharges
and applications of plasmas
in electrical engineering and microelectronics
fabrication. Initiation or
prevention of electrical breakdown in gases and the applications of plasmas formed as a consequence of electrical
breakdown have been found very useful in a broad range of engineering fields,
especially electrical engineering. Students
will learn the design and analytical skills in the use of gases as an excellent
electrical insulator by properly preventing gases from breaking down and the
optimization of methods for generating plasmas of desired volume, density, and
temperature for a variety of industrial
applications. This course will allow
students such as senior undergraduate students or graduate students who have
learned adequate knowledge in the general electrical engineering or other
related fields to explore the optimization and applications of gas plasmas
Prerequisites by topic:
1. Basic electromagnetics
2. Atomic and nuclear systems
3. Elementary particles
Topics:
1. Cold plasmas and thermal plasmas
2. Examples of applications of plasmas
3. Electrical breakdown and discharges in DC electrical
fields
4. Properties and basic theories of plasmas
5. Characterization of plasmas
6. Electrical breakdown and discharges in RF and microwave
electrical fields
7. Plasma processing techniques for microelectronics
fabrication
8. Student presentations
9. Tests
Grades:
Homework,
reports, and presentations (40%), two tests (20% x 2) and comprehensive final
exam (20%).
Turn in topics for the first presentations Before Friday of the
second week
Turn in Report 1: Monday of the fourth week. Turn in
(1)
One copy each of two reference papers, web pages, and/or book chapters (For
book references, look for the page, that is usually among the first three pages
of a book, that contains all the info about title, author, publisher, ISBN
numbers, etc., and make a copy of this page.
If the book has been checked out from the library, write the reference
number on this copy. Make a copy of the table of contents
that contains the chapter you use as the reference.)
(2)
Summary (2-5 pages) of those references (each person needs to write his/her own
summary) The
report must follow the format of a technical journal of your choice in writing
and in quoting references. Indicate
which journal do you choose as the format of the
summary. Summary needs to be turned in
both in printed form and by an email attachment using either MS Words or PDF
format.
Report 2: Monday
of the fifth week: Turn in the second
report for two additional references.
You may integrate the new references with the previous ones.
Report 3: Monday
of the sixth week: Report for two
additional references.
Presentation
1: Starting
from Monday of the seventh week.
One
presentation by each group. Make copies
of viewgraphs
for distribution to all classmates before presentation and
turn in one copy (both paper copy and electronic copy in .ppt
form) to me. You may make an appointment
with me to preview your viewgraphs for presentation. At the beginning of the presentation, list
2-3 questions that the class should learn from your presentation. These questions are homework assignment due
(by email attachment sent to me) on the following class meeting day. 20-25 minutes for each presentation.
Test 1: Friday
of the eighth week. Will cover class
lectures and
brief
questions about presentations made by all groups.
Report 4: Monday
of the tenth week.
Repeat
on two more references.
Report 5: Monday
of the eleventh week.
Report
on two more references.
Report 6: Monday
of the twelfth week.
Report
on two more references.
Presentation
2: Starting
from Monday of the thirteenth week. Same
format as the first presentation.
Test 2: Monday
of the fifteenth week covering the class lectures and brief questions about
presentations made by all groups.
Final
exam and
Final
comprehensive report (paper and electronic) As scheduled by