Dissertations and Theses

  1. Joseph C. Jacob, "PYRAMID - A Hierarchical Rule-based Scheme for Proximity Effect Correction in Electron-beam Lithography: A Implementation for Single Layer Circuits," MS thesis, Cornell University, May 1992

  2. Brian D. Cook, "PYRAMID - A Hierarchical Rule-based Proximity Effect Correction Scheme for Electron-beam Lithography: Generalization and Optimization for Homogeneouse Substrates," Ph.D. dissertation, Cornell University, August 1996.

  3. Jayesh Laddha, "An Efficient Hierarchical Pattern Representation Format for Proximity Effect Correction in E-beam Lithography," MS thesis, Auburn University, March 2000.

  4. Dake He, "An Extension of the Dose Modification PYRAMID: Circuit Primitive Partitioning and Simultaneous Correction," M.S. thesis, Auburn University, December 2000.

  5. Fei Hu, "An Implementation of Proximity Effect Correction for Grayscale E-beam Lithography," M.S. thesis, Auburn University, December 2002.

  6. Noppachai Anupongpaibool, "Distributed Proximity Effect Correction for Grayscale E-beam Lithography on a Heterogeneous Cluster," M.S. thesis, Auburn University, May 2004.

  7. Kasi Anbumony, "Analysis and Correction of Three-Dimensional Proximity in Binary E-beam Nanolithography," M.S. Thesis, Auburn University, 2007.

  8. Pengcheng Li, "Step-Width Adjustment and Sidewall Control in Electron-beam Lithography," M.S. Thesis, Auburn University, 2010.

  9. Qing Dai, "True Three-Dimensional Proximity Effect Correction in Electron-beam Lithography: Control of Critical Dimension and Sidewall Shape," Ph.D. Dissertation, Auburn University, 2012.

  10. Rui Guo, "Analytic Derivation and Minimization of Line Edge Roughness in Electron-beam Lithography," Ph.D. Dissertation, Auburn University, 2017.

  11. Hyesung Ji, "Designing an Anisotropic Noise Filter for Measuring Critical Dimension and Line Edge Roughness from SEM Images," M.S. Thesis, Auburn University, 2018.