Dissertations and Theses

  1. Joseph C. Jacob, "PYRAMID - A Hierarchical Rule-based Scheme for Proximity Effect Correction in Electron-beam Lithography: A Implementation for Single Layer Circuits," MS thesis, Cornell University, May 1992

  2. Brian D. Cook, "PYRAMID - A Hierarchical Rule-based Proximity Effect Correction Scheme for Electron-beam Lithography: Generalization and Optimization for Homogeneouse Substrates," Ph.D. dissertation, Cornell University, August 1996.

  3. Jayesh Laddha, "An Efficient Hierarchical Pattern Representation Format for Proximity Effect Correction in E-beam Lithography," MS thesis, Auburn University, March 2000.

  4. Dake He, "An Extension of the Dose Modification PYRAMID: Circuit Primitive Partitioning and Simultaneous Correction," M.S. thesis, Auburn University, December 2000.

  5. Fei Hu, "An Implementation of Proximity Effect Correction for Grayscale E-beam Lithography," M.S. thesis, Auburn University, December 2002.

  6. Noppachai Anupongpaibool, "Distributed Proximity Effect Correction for Grayscale E-beam Lithography on a Heterogeneous Cluster," M.S. thesis, Auburn University, May 2004.

  7. Kasi Anbumony, "Analysis and Correction of Three-Dimensional Proximity in Binary E-beam Nanolithography," M.S. Thesis, Auburn University, 2007.

  8. Pengcheng Li, "Step-Width Adjustment and Sidewall Control in Electron-beam Lithography," M.S. Thesis, Auburn University, 2010.

  9. Qing Dai, "True Three-Dimensional Proximity Effect Correction in Electron-beam Lithography: Control of Critical Dimension and Sidewall Shape," Ph.D. Dissertation, Auburn University, 2012.