IMAGE PROCESSING


Application to Electron-beam Lithography (see PYRAMID Project):
E-beam Proximity Effect Correction
Dose Control for Fabrication Nanoscale 3-D Structures
Resist Profile Estimation and Control
Estimation and Minimization of LER (Line Edge Roughness)
Modeling SEM (Scanning Electron Microscope) Images


Parallel Image Processing (see Parallel & Distributed Computing):
Convolution
CT Image Reconstruction
Proximity Effect Correction