The dose modification version has been developed following the two-level PYRAMID hierarchy, which controls the spatial dose distribution within each circuit primitive for correction of proximity effect.
Rule-tables are used to speed up correction.
It employs a two-level hierarchy of correction to be general and fast.
Fast but accurate estimation of exposure is possible due to decomposition of exposure into local and global components and use of the CDF table.
It is compatible with not only raster or vector scan machines but also shaped-beam machines.