# INTRODUCTION TO MICROELECTRONIC FABRICATION SECOND EDITION

## RICHARD C. JAEGER

### First Printing Errata - Updated 07/30/03

Page number: Correction

42: Problem 2.5 180-nm should be 120-nm.

65: Problems 3.11 and 3.12:  Assume a temperature of 1100 oC.

104: Problem 4.4(b) should refer to Fig. 4.12 .

106: Problem 4.10(e) should refer to part (d) .

106: Figure P4.10: The spacings between resistor legs should all be 3l.

107: Problem 4.14: Assume NB = 1016/cm3 .

107: Problem 4.15: Assume a 0.3 W-cm p-type substrate.

107: Problem 4.21(c): the temperature should be 950 oC; Problem 4.21(d) should refer to Fig. 4.12.

128: Problem 5.18: "minimum substrate temperature" should be " maximum substrate temperature"

150: Problem 6.5: 1000 molecules/cm3 ; Problem 6.14: A1 should be Al

169: The gray shading in Fig. 7.18 is almost invisible.  Here is a corrected drawing: Download Fig. 7.18

171: The figure captions for Fig. 7.20 are reversed.

176: Problem 7.12(c): ... if a 1- mm thick "low-K"...

199: Problem 8.4: Compare the five yield ...; Problem 8.5 should refer to Fig. 8.16 not Fig. 8.11.

200: Problem 8.12.  Assume a die cost of \$1.00 to find the die sizes.

200: Problems 8.13 and 8.15: References to Fig. 8.11 should be to Fig. 8.16.

212: Paragraoh above Section 9.2:  "scale factor a = square root of 2"

265: Problem 10.2: NE/DE = should be GE = ...; Problem 10.3: What epitaxial layer doping may

267: Problem 10.13: Reference should be to Table 10.1 not Table 10.2.

268: Problem 10.22: "What is a lower bound ..."; Problem 10.27: 1 m should be 1 mm.

270: Table 11.1: Density should be in g/cm3 .

273: Third line: 22o should be 35o.

1.5    34.4 x 109 transistors

1.13    1 M, 16 M, 100 M

3.7    3.1 hours, 74 hours

4.3    5.21 hrs

4.15    14.5, 34.9, 203, 2840, 9.72, 12.5

5.1    3.5 x 1018/cm3, 7.5 x 1013/cm2 , 0.47 mm

5.3    900 keV, 0.13 mm

5.5    1.0 x 1015/cm2, 10.5 hrs

5.7    60.7 sec

5.11    2.69 x 104 m/sec should be 8.85 x104 m/sec

5.13    53 nm, 870 nm

6.1    820 psec

6.3    2.68 x 1020 molecules/sec, 72 m, 7.5 x 10-7 Torr

6.11    1247oC, delete 0.35 eV

6.15    0.886, 0.886, 0.769

6.17    N(x) = 1020{1 + erf [(x-2)/0.045]} /cm3

7.5    5 x 10-9W-cm2

8.3    392, 492, 3746

8.7    \$4.06 vs. \$4.89, \$6.52 vs. \$6.57

8.13    17%, 8.3%

9.13    -0.16 V, -1.21 V, 1.67 x 1012/cm2, 3.02 x 1011 /cm2

9.21    384 l2, 40 l 2

10.3    90 V

10.9    2/3, 2 , 2d(W+L)/WL ...

10.13    193 kW, 9.63 kW, 803 W

10.19    33 nm

10.27    6-7 V, 8 V

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