Wang Research Group

 Department of Chemical Engineering

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Publications

Journals

Patents

Proceedings

Presentations

Book Chapters:

"An alternative stiction modeling approach and comparison of different stiction models"
He, Q.P., Wang, J. & Qin, S.J.
in Detection and Diagnosis of Stiction in Control Loops – State of the Art and Advanced Methods, Jelali, M. and Huang, B. (Eds.), Springer, in press, 2009

 

Peer-Reviewed Journal Articles:

"Statistics pattern analysis - A new process monitoring framework and it s application to semiconductor batch processes"

submitted to AIChE Journal, 2009

He, Q.P. and Wang, J.

"Properties of EWMA controllers with gain adaptation"

IEEE Transactions on Semiconductor Manufacturing, 2009, accepted

Wang, J.

"Large-scale Semiconductor Process Monitoring Using a Fast Pattern Recognition Based Method"

IEEE Transactions on Semiconductor Manufacturing, 2009, accepted

He, Q.P. and Wang, J.

"Stability analysis and optimal tuning of EWMA controllers: Gain adaptation vs. intercept adaptation"

Journal of Process Control, in press, 2009, nominated for the Annual Best Paper Award

Wang, J., He, Q.P. and Qin, S.J.

"On state estimation of high-mix semiconductor manufacturing"

Journal of Process Control, Vol. 19 (2), 443-456, 2009

Wang, J., He, Q.P. and Edgar, T.F.

"Fault detection using K-nearest neighbor rule for semiconductor manufacturing"

IEEE Transactions on Semiconductor Manufacturing, Vol.20 (4), 345-354, 2007.

He, Q.P. and Wang, J.

"Run-to-run control and state estimation in semiconductor manufacturing"

Annual Reviews in Control, Vol. 31, 241-253, 2007

Bode, C.A., Wang, J., He, Q.P. and Edgar, T.F.

"A Curve fitting method for detecting valve stiction in oscillating control loops"

Industrial & Engineering Chemistry Research, vol.46 (13), 4549-4560, 2007.

He, Q.P., Wang, J., Pottmann, M. and Qin, S.J.

"A new Bayesian approach for fast disturbance detection and classification in microelectronics manufacturing"

IEEE Transactions on Semiconductor Manufacturing, Vol. 20 (2), 126-136, 2007.

Wang, J. and He, Q.P.

"Closed-loop subspace identification using the parity space"

Automatica, Vol. 42(2), 315-320, 2006.

Wang, J. and Qin, S.J.

"Semiconductor manufacturing process control and monitoring: a fab-wide framework"

Journal of Process Control, Vol.16, 179-191, 2006.

Qin, S.J., Cherry, G., Good, Wang, J., and Harrison C.

"Recursive least squares estimation for run-to-run control with metrology delay and its application to STI etch process"

IEEE Transactions on Semiconductor Manufacturing, Vol. 18(2), 309-319, 2005.

Wang, J., He, Q.P., Qin, S. J., Bode, C. and Purdy, M.

"A new fault diagnosis method using fault directions in Fisher discriminant analysis"

AIChE Journal, Vol. 51(2), 555-571, 2005.

He, Q.P., Wang, J. and Qin, S. J.

"A new subspace identification approach based on principal component analysis"

Journal of Process Control, Vol. 12(8), 841-855, 2002.

Wang, J. and Qin, S.J.

"Determination of zeta-potential by measuring electroosmotic flux in an alternating electric field and its application in the study of membrane fouling"

Separation Science and Technology, 35(8), 1195-1206, 2000.

Wang, J., Liu, Z., Luo, J., He, Q.P., Ding, F. and Yuan, N.

"Longitudinal distribution of pH in preparative electrophoresis in a multicompartment electrolyzer"

Separation Science and Technology, 34(8), 1661-1677, 1999.

Wang, J., Liu, Z., Ding, F. and Yuan, N.

"Characterization of membrane fouling process using zeta-potential"

Huagong Xuebao (Chinese), 50(5), 687-691, 1999.

Wang, J., Liu, Z., He, Q.P., Luo, J. and Yuan, N.

"Application of multichannel flow electrophoresis to separation of biomolecules: a survey"

Journal of Molecular Recognition, 11, 149-150, 1998.

Liu, Z., Wang, J., Luo, J., Ding, F., and Yuan, N.

"pH value distribution model for multichannel flow electrophoresis"

Huagong Xuebao (Chinese), 49(5), 592-600, 1998.

Wang, J., Liu, Z., Luo, J., Ding, F. and Yuan, N. (1998).

"Continuous separation of proteins by poly(vinyl alcohol) shielded multichannel flow electrophoresis"

Biotechnology Techniques, 10(4), 253-256, 1996.

Liu, Z., Wang, J., Huang, Z., Ding, F., Shen, Z. and Yuan, N.

"Application of hydrophilic polymers in multichannel flow electrophoresis"

Tsinghua Science and Technology, 1(4), 336-340, 1996.

Liu, Z., Zhao, Y., Wang, J., Huang, Z., Ding, F. and Yuan, N.

"Multichannel flow electrophoresis in an alternating electric field"

Separation Science and Technology, 31(16), 2257-2271, 1996.

Liu, Z., Yang, H., Huang, Z., Wang, J., Ding, F. and Yuan, N.