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Dr. W. Robert Ashurst
Assistant Professor of Chemical Engineering

Department of Chemical Engineering
Tel: 334.844.2559
Fax: 334.844.2063

Office Address
227 Ross Hall
Auburn University, AL 36849

Mailing Address
212 Ross Hall
Auburn University, AL 36849
Research Interests

    Micro- and nano-electromechanical systems design, fabrication and reliability; micro- and nano-tribology; molecularly thin film synthesis and design; novel thin film processing; surface science; and semiconductor materials processing.

Selected Publications

    W. R. Ashurst, M. B. J. Wijesundara, C. Carraro and R. Maboudian, "Tribological Impact of SiC Encapsulation of Released Polycrystalline Silicon Microstructures", Tribology Letters, 17 (2), pp. 195-198, (2004).
    W. R. Ashurst, C. Carraro and R. Maboudian, "Vapor Phase Anti-Stiction Coatings for MEMS", IEEE Transactions on Device and Materials Reliability, 3 (4), pp. 173-178, (2004).
    W. R. Ashurst, C. Carraro, W. Frey and R. Maboudian "Wafer Level Anti-Stiction Coatings for MEMS", Sensors and Actuators A 104, pp. 213-221 (2003).

The contents of this site were last changed 10/15/2006