Published: Feb 12, 2008 3:43:21 PM
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Thomas F. Edgar, Abell Chair of Engineering at the University of Texas, will discuss a process control framework for semiconductor manufacturing as part of the 2007-2008 Chemical Engineering Seminar Program. The lecture will be held on Wednesday, Feb. 13 at 3:30 p.m. in the McMillan Auditorium in Ross Hall. The presentation will review how research findings in modeling and control have influenced commercial applications, such as lithography and plasma etching as well as in overall factory control.
Edgar received his bachelor's degree in chemical engineering from the University of Kansas and a doctorate from Princeton University. For the past 35 years, he has concentrated his academic work in process modeling, control and optimization and has recently carried out modeling and control research projects jointly with AMD, Motorola, Texas Instruments, Yield Dynamics, Tokyo Electron and SE MATHECH.